Design, Assembly, and Simulation of Flexure-Based Modular Micro-Positioning Stages

With flexure-based micro-positioning stages (MPSs) being in high demand for high-precision applications, the performance and cost of MPSs are two issues that urgently need to be addressed. In addition, current developed toward complex spatial configurations, which further precludes monolithic fabrication. To address aforementioned issues, modular using designed standardized modules introduced this paper. Firstly, motivations described, followed by design. a new assembly concept analogy with composing compounds is proposed guiding module assembly, including some planar configurations. For validation, static dynamic performances respect different materials presented as case studies. The can provide better flexibility functionality applications.